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KE43103 VLSI TECHNOLOGY [2-2022/2023]
This elective course is designed for students majoring in electrical and electronic engineering with a focus on micro/nanoelectronics. The course aims to provide an overview of the semiconductor industry and the production of integrated circuits (ICs) for various electronic circuit applications, particularly very large scale IC (VLSI) technology. Students will learn about the fabrication of transistor devices in designated clean rooms, as well as the evolution of microprocessor systems towards ultra-scaled IC (ULSI) technology, which comprises up to 7.5 million transistors on a single chip.
The course will also cover essential knowledge of layout design rules for complementary metal-oxide-semiconductor (CMOS) inverters, a fundamental component of circuit manufacturing. The stick diagram method will be used to explore this topic. Additionally, students will learn about the modeling of MOSFET devices based on their physical characteristics, using MatLab software to create insightful models.
The course will also delve into the properties of semiconductor materials and their chemical reactions in device manufacturing. Topics covered will include crystal structure, crystal growth, epitaxial techniques, chemical vapor deposition (CVD), oxidation, diffusion, ion implantation, photolithography, and fabrication processes for MOS, BJT, and other types of transistors.
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